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Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT
Considering the evolution of rotation sensing and timing applications realized in micro-electro-mechanical systems (MEMS), flexural mode resonant shapes are outperformed by bulk acoustic wave (BAW) counterparts by achieving higher frequencies with both electrostatic and piezoelectric transduction. W...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10160121/ https://www.ncbi.nlm.nih.gov/pubmed/37152864 http://dx.doi.org/10.1038/s41378-023-00521-3 |