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Data-driven automated control algorithm for floating-zone crystal growth derived by reinforcement learning
The complete automation of materials manufacturing with high productivity is a key problem in some materials processing. In floating zone (FZ) crystal growth, which is a manufacturing process for semiconductor wafers such as silicon, an operator adaptively controls the input parameters in accordance...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10169811/ https://www.ncbi.nlm.nih.gov/pubmed/37161006 http://dx.doi.org/10.1038/s41598-023-34732-5 |