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Data-driven automated control algorithm for floating-zone crystal growth derived by reinforcement learning

The complete automation of materials manufacturing with high productivity is a key problem in some materials processing. In floating zone (FZ) crystal growth, which is a manufacturing process for semiconductor wafers such as silicon, an operator adaptively controls the input parameters in accordance...

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Detalles Bibliográficos
Autores principales:	Tosa, Yusuke, Omae, Ryo, Matsumoto, Ryohei, Sumitani, Shogo, Harada, Shunta
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10169811/ https://www.ncbi.nlm.nih.gov/pubmed/37161006 http://dx.doi.org/10.1038/s41598-023-34732-5

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