Probing the Atomic Arrangement of Subsurface Dopants in a Silicon Quantum Device Platform

[Image: see text] High-density structures of subsurface phosphorus dopants in silicon continue to garner interest as a silicon-based quantum computer platform; however, a much-needed confirmation of their dopant arrangement has been lacking. In this work, we take advantage of the chemical specificit...

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Detalles Bibliográficos
Autores principales: Røst, Håkon I., Tosi, Ezequiel, Strand, Frode S., Åsland, Anna Cecilie, Lacovig, Paolo, Lizzit, Silvano, Wells, Justin W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10176322/
https://www.ncbi.nlm.nih.gov/pubmed/37114767
http://dx.doi.org/10.1021/acsami.2c23011

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10176322/
https://www.ncbi.nlm.nih.gov/pubmed/37114767
http://dx.doi.org/10.1021/acsami.2c23011

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