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Probing the Atomic Arrangement of Subsurface Dopants in a Silicon Quantum Device Platform
[Image: see text] High-density structures of subsurface phosphorus dopants in silicon continue to garner interest as a silicon-based quantum computer platform; however, a much-needed confirmation of their dopant arrangement has been lacking. In this work, we take advantage of the chemical specificit...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10176322/ https://www.ncbi.nlm.nih.gov/pubmed/37114767 http://dx.doi.org/10.1021/acsami.2c23011 |