MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature

In this paper, we present an innovative manufacturing process for the production of capacitive pressure and force sensors with excellent thermal stability for high-temperature applications. The sensors, which are manufactured from a stack of two silicon chips mounted via with gold–silicon (Au-Si) or...

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Detalles Bibliográficos
Autores principales: Ghanam, Muhannad, Goldschmidtboeing, Frank, Bilger, Thomas, Bucherer, Andreas, Woias, Peter
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181345/
https://www.ncbi.nlm.nih.gov/pubmed/37177453
http://dx.doi.org/10.3390/s23094248

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181345/
https://www.ncbi.nlm.nih.gov/pubmed/37177453
http://dx.doi.org/10.3390/s23094248

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