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MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature

In this paper, we present an innovative manufacturing process for the production of capacitive pressure and force sensors with excellent thermal stability for high-temperature applications. The sensors, which are manufactured from a stack of two silicon chips mounted via with gold–silicon (Au-Si) or...

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Autores principales: Ghanam, Muhannad, Goldschmidtboeing, Frank, Bilger, Thomas, Bucherer, Andreas, Woias, Peter
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181345/
https://www.ncbi.nlm.nih.gov/pubmed/37177453
http://dx.doi.org/10.3390/s23094248
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author Ghanam, Muhannad
Goldschmidtboeing, Frank
Bilger, Thomas
Bucherer, Andreas
Woias, Peter
author_facet Ghanam, Muhannad
Goldschmidtboeing, Frank
Bilger, Thomas
Bucherer, Andreas
Woias, Peter
author_sort Ghanam, Muhannad
collection PubMed
description In this paper, we present an innovative manufacturing process for the production of capacitive pressure and force sensors with excellent thermal stability for high-temperature applications. The sensors, which are manufactured from a stack of two silicon chips mounted via with gold–silicon (Au-Si) or aluminum–silicon (Al-Si) eutectic bonding, are shielded, miniaturized, and allow an operating temperature of up to 500 °C. Compared to conventional methods, the greatest benefit of the manufacturing process is that different sensor dimensions can be produced in the same batch for a wide measuring range, from mN to kN. The characterization of the realized sensors shows a high linearity and a low temperature drift of 99.992% FS and −0.001% FS/K at 350 °C, as well as a nonlinearity of 0.035% FS and a temperature drift of −0.0027% FS/K at 500 °C.
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spelling pubmed-101813452023-05-13 MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature Ghanam, Muhannad Goldschmidtboeing, Frank Bilger, Thomas Bucherer, Andreas Woias, Peter Sensors (Basel) Article In this paper, we present an innovative manufacturing process for the production of capacitive pressure and force sensors with excellent thermal stability for high-temperature applications. The sensors, which are manufactured from a stack of two silicon chips mounted via with gold–silicon (Au-Si) or aluminum–silicon (Al-Si) eutectic bonding, are shielded, miniaturized, and allow an operating temperature of up to 500 °C. Compared to conventional methods, the greatest benefit of the manufacturing process is that different sensor dimensions can be produced in the same batch for a wide measuring range, from mN to kN. The characterization of the realized sensors shows a high linearity and a low temperature drift of 99.992% FS and −0.001% FS/K at 350 °C, as well as a nonlinearity of 0.035% FS and a temperature drift of −0.0027% FS/K at 500 °C. MDPI 2023-04-25 /pmc/articles/PMC10181345/ /pubmed/37177453 http://dx.doi.org/10.3390/s23094248 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Ghanam, Muhannad
Goldschmidtboeing, Frank
Bilger, Thomas
Bucherer, Andreas
Woias, Peter
MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature
title MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature
title_full MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature
title_fullStr MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature
title_full_unstemmed MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature
title_short MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature
title_sort mems shielded capacitive pressure and force sensors with excellent thermal stability and high operating temperature
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181345/
https://www.ncbi.nlm.nih.gov/pubmed/37177453
http://dx.doi.org/10.3390/s23094248
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