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Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution

Transmission electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limita...

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Detalles Bibliográficos
Autores principales: Zhang, Xuelin, Zhou, Yufan, Chen, Ying, Li, Ming, Yu, Haitao, Li, Xinxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181734/
https://www.ncbi.nlm.nih.gov/pubmed/37177673
http://dx.doi.org/10.3390/s23094470
Descripción
Sumario:Transmission electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limitation, a microchip was developed for in situ TEM characterization, enabling the real-time study of material structure evolution and chemical process mechanisms. This microchip, based on microelectromechanical System (MEMS) technology, is capable of introducing multi-physics stimulation and can be used in conjunction with TEM to investigate the dynamic changes of matter in gas and high-temperature environments. The microchip design ensures a high-temperature uniformity in the sample observation area, and a system of tests was established to verify its performance. Results show that the temperature uniformity of 10 real-time observation windows with a total area of up to 1130 μm(2) exceeded 95%, and the spatial resolution reached the lattice level, even in a flowing atmosphere of 1 bar.