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Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution

Transmission electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limita...

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Autores principales: Zhang, Xuelin, Zhou, Yufan, Chen, Ying, Li, Ming, Yu, Haitao, Li, Xinxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181734/
https://www.ncbi.nlm.nih.gov/pubmed/37177673
http://dx.doi.org/10.3390/s23094470
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author Zhang, Xuelin
Zhou, Yufan
Chen, Ying
Li, Ming
Yu, Haitao
Li, Xinxin
author_facet Zhang, Xuelin
Zhou, Yufan
Chen, Ying
Li, Ming
Yu, Haitao
Li, Xinxin
author_sort Zhang, Xuelin
collection PubMed
description Transmission electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limitation, a microchip was developed for in situ TEM characterization, enabling the real-time study of material structure evolution and chemical process mechanisms. This microchip, based on microelectromechanical System (MEMS) technology, is capable of introducing multi-physics stimulation and can be used in conjunction with TEM to investigate the dynamic changes of matter in gas and high-temperature environments. The microchip design ensures a high-temperature uniformity in the sample observation area, and a system of tests was established to verify its performance. Results show that the temperature uniformity of 10 real-time observation windows with a total area of up to 1130 μm(2) exceeded 95%, and the spatial resolution reached the lattice level, even in a flowing atmosphere of 1 bar.
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spelling pubmed-101817342023-05-13 Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution Zhang, Xuelin Zhou, Yufan Chen, Ying Li, Ming Yu, Haitao Li, Xinxin Sensors (Basel) Article Transmission electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limitation, a microchip was developed for in situ TEM characterization, enabling the real-time study of material structure evolution and chemical process mechanisms. This microchip, based on microelectromechanical System (MEMS) technology, is capable of introducing multi-physics stimulation and can be used in conjunction with TEM to investigate the dynamic changes of matter in gas and high-temperature environments. The microchip design ensures a high-temperature uniformity in the sample observation area, and a system of tests was established to verify its performance. Results show that the temperature uniformity of 10 real-time observation windows with a total area of up to 1130 μm(2) exceeded 95%, and the spatial resolution reached the lattice level, even in a flowing atmosphere of 1 bar. MDPI 2023-05-04 /pmc/articles/PMC10181734/ /pubmed/37177673 http://dx.doi.org/10.3390/s23094470 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhang, Xuelin
Zhou, Yufan
Chen, Ying
Li, Ming
Yu, Haitao
Li, Xinxin
Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution
title Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution
title_full Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution
title_fullStr Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution
title_full_unstemmed Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution
title_short Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution
title_sort advanced in situ tem microchip with excellent temperature uniformity and high spatial resolution
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181734/
https://www.ncbi.nlm.nih.gov/pubmed/37177673
http://dx.doi.org/10.3390/s23094470
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