Microwave Diamond-Based HBAR as a Highly Sensitive Sensor for Multiple Applications: Acoustic Attenuation in the Mo Film

The application of microwave diamond-based HBAR as a sensor of microwave acoustic attenuation α was considered, using the Mo film as an object of research. A multilayered piezoelectric structure, as the Al/Al(0.73)Sc(0.27)N/Mo/(100) diamond/Mo, was produced using aluminum–scandium nitride compositio...

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Detalles Bibliográficos
Autores principales: Sorokin, Boris, Asafiev, Nikita, Yashin, Dmitry, Luparev, Nikolay, Golovanov, Anton, Kravchuk, Konstantin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181758/
https://www.ncbi.nlm.nih.gov/pubmed/37177705
http://dx.doi.org/10.3390/s23094502

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181758/
https://www.ncbi.nlm.nih.gov/pubmed/37177705
http://dx.doi.org/10.3390/s23094502

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