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Microwave Diamond-Based HBAR as a Highly Sensitive Sensor for Multiple Applications: Acoustic Attenuation in the Mo Film
The application of microwave diamond-based HBAR as a sensor of microwave acoustic attenuation α was considered, using the Mo film as an object of research. A multilayered piezoelectric structure, as the Al/Al(0.73)Sc(0.27)N/Mo/(100) diamond/Mo, was produced using aluminum–scandium nitride compositio...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181758/ https://www.ncbi.nlm.nih.gov/pubmed/37177705 http://dx.doi.org/10.3390/s23094502 |