Millisecond flash lamp curing for porosity generation in thin films

Flash lamp annealing (FLA) with millisecond pulse durations is reported as a novel curing method for pore precursor's degradation in thin films. A case study on the curing of dielectric thin films is presented. FLA-cured films are being investigated by means of positron annihilation spectroscop...

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Detalles Bibliográficos
Autores principales: Attallah, Ahmed G., Prucnal, Slawomir, Buttering, Maik, Hirschmann, Eric, Koehler, Nicole, Schulz, Stefan E., Wagner, Andreas, Liedke, Maciej O.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181987/
https://www.ncbi.nlm.nih.gov/pubmed/37173360
http://dx.doi.org/10.1038/s41598-023-34748-x

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181987/
https://www.ncbi.nlm.nih.gov/pubmed/37173360
http://dx.doi.org/10.1038/s41598-023-34748-x

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