Frequency unlocking-based MEMS bifurcation sensors

MEMS resonators exhibit rich dynamic behaviors under the internal resonance regime. In this work, we present a novel MEMS bifurcation sensor that exploits frequency unlocking due to a 1:3 internal resonance between two electrostatically coupled micro-resonators. The proposed detection mechanism allo...

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Detalles Bibliográficos
Autores principales: Qiao, Yan, Shi, Zhan, Xu, Yutao, Wei, Xueyong, Elhady, Alaaeldin, Abdel-Rahman, Eihab, Huan, Ronghua, Zhang, Wenming
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10185684/
https://www.ncbi.nlm.nih.gov/pubmed/37201104
http://dx.doi.org/10.1038/s41378-023-00522-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10185684/
https://www.ncbi.nlm.nih.gov/pubmed/37201104
http://dx.doi.org/10.1038/s41378-023-00522-2

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