Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method

The application of single-crystal silicon (SCS) nanopore structures in single-molecule-based analytical devices is an emerging approach for the separation and analysis of nanoparticles. The key challenge is to fabricate individual SCS nanopores with precise sizes in a controllable and reproducible w...

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Detalles Bibliográficos
Autores principales: Hong, Hao, Wei, Jiangtao, Lei, Xin, Chen, Haiyun, Sarro, Pasqualina M., Zhang, Guoqi, Liu, Zewen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10188523/
https://www.ncbi.nlm.nih.gov/pubmed/37206700
http://dx.doi.org/10.1038/s41378-023-00532-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10188523/
https://www.ncbi.nlm.nih.gov/pubmed/37206700
http://dx.doi.org/10.1038/s41378-023-00532-0

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