Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing

[Image: see text] Submerged plasma-assisted discharge direct patterning of diamond-like carbon (DLC) onto the silicon substrate in ambient conditions has succeeded as a new and novel soft solution process. In this environmentally benign technique, a copious amount of pure ethanol (ca. 4 mL) was loca...

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Detalles Bibliográficos
Autores principales: Sahoo, Sumanta Kumar, Bolagam, Ravi, Sardar, Kripasindhu, Kaneko, Satoru, Shi, Shih-Chen, Chang, Kao-Shuo, Yoshimura, Masahiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10193553/
https://www.ncbi.nlm.nih.gov/pubmed/37214720
http://dx.doi.org/10.1021/acsomega.3c01322

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10193553/
https://www.ncbi.nlm.nih.gov/pubmed/37214720
http://dx.doi.org/10.1021/acsomega.3c01322

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