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Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing
[Image: see text] Submerged plasma-assisted discharge direct patterning of diamond-like carbon (DLC) onto the silicon substrate in ambient conditions has succeeded as a new and novel soft solution process. In this environmentally benign technique, a copious amount of pure ethanol (ca. 4 mL) was loca...
Autores principales: | Sahoo, Sumanta Kumar, Bolagam, Ravi, Sardar, Kripasindhu, Kaneko, Satoru, Shi, Shih-Chen, Chang, Kao-Shuo, Yoshimura, Masahiro |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2023
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10193553/ https://www.ncbi.nlm.nih.gov/pubmed/37214720 http://dx.doi.org/10.1021/acsomega.3c01322 |
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