Thickness Mapping and Layer Number Identification of Exfoliated van der Waals Materials by Fourier Imaging Micro-Ellipsometry

[Image: see text] As performance of van der Waals heterostructure devices is governed by the nanoscale thicknesses and homogeneity of their constituent mono- to few-layer flakes, accurate mapping of these properties with high lateral resolution becomes imperative. Spectroscopic ellipsometry is a pro...

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Detalles Bibliográficos
Autores principales: Kenaz, Ralfy, Ghosh, Saptarshi, Ramachandran, Pradheesh, Watanabe, Kenji, Taniguchi, Takashi, Steinberg, Hadar, Rapaport, Ronen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10210540/
https://www.ncbi.nlm.nih.gov/pubmed/37155829
http://dx.doi.org/10.1021/acsnano.2c12773

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10210540/
https://www.ncbi.nlm.nih.gov/pubmed/37155829
http://dx.doi.org/10.1021/acsnano.2c12773

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