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Investigation into Photolithography Process of FPCB with 18 µm Line Pitch

Due to the widespread application of flexible printed circuit boards (FPCBs), attention is increasing being paid to photolithography simulation with the continuous development of ultraviolet (UV) photolithography manufacturing. This study investigates the exposure process of an FPCB with an 18 µm li...

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Detalles Bibliográficos
Autores principales: Sun, Ke, Wu, Gai, Liang, Kang, Sun, Bin, Wang, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10220538/
https://www.ncbi.nlm.nih.gov/pubmed/37241643
http://dx.doi.org/10.3390/mi14051020