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Investigation into Photolithography Process of FPCB with 18 µm Line Pitch
Due to the widespread application of flexible printed circuit boards (FPCBs), attention is increasing being paid to photolithography simulation with the continuous development of ultraviolet (UV) photolithography manufacturing. This study investigates the exposure process of an FPCB with an 18 µm li...
Autores principales: | Sun, Ke, Wu, Gai, Liang, Kang, Sun, Bin, Wang, Jian |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10220538/ https://www.ncbi.nlm.nih.gov/pubmed/37241643 http://dx.doi.org/10.3390/mi14051020 |
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