TCAD Analysis of Leakage Current and Breakdown Voltage in Small Pitch 3D Pixel Sensors

Small-pitch 3D pixel sensors have been developed to equip the innermost layers of the ATLAS and CMS tracker upgrades at the High Luminosity LHC. They feature 50 × 50 and 25 × 100 [Formula: see text] m [Formula: see text] geometries and are fabricated on p-type Si–Si Direct Wafer Bonded substrates of...

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Detalles Bibliográficos
Autores principales: Ye, Jixing, Boughedda, Abderrezak, Sultan, D M S, Dalla Betta, Gian-Franco
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10220660/
https://www.ncbi.nlm.nih.gov/pubmed/37430645
http://dx.doi.org/10.3390/s23104732

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10220660/
https://www.ncbi.nlm.nih.gov/pubmed/37430645
http://dx.doi.org/10.3390/s23104732

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