Cargando…
A CMOS-MEMS Pixel Sensor for Thermal Neutron Imaging
A monolithic pixel sensor with high spatial granularity (35 × 40 μm(2)) is presented, aiming at thermal neutron detection and imaging. The device is made using the CMOS SOIPIX technology, with Deep Reactive-Ion Etching post-processing on the backside to obtain high aspect-ratio cavities that will be...
| Autores principales: | , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10220710/ https://www.ncbi.nlm.nih.gov/pubmed/37241574 http://dx.doi.org/10.3390/mi14050952 |