Cargando…

A CMOS-MEMS Pixel Sensor for Thermal Neutron Imaging

A monolithic pixel sensor with high spatial granularity (35 × 40 μm(2)) is presented, aiming at thermal neutron detection and imaging. The device is made using the CMOS SOIPIX technology, with Deep Reactive-Ion Etching post-processing on the backside to obtain high aspect-ratio cavities that will be...

Descripción completa

Detalles Bibliográficos
Autores principales:	Mendicino, Roberto, Dalla Betta, Gian-Franco
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10220710/ https://www.ncbi.nlm.nih.gov/pubmed/37241574 http://dx.doi.org/10.3390/mi14050952

Ejemplares similares

Development of new 3D pixel sensors for phase 2 upgrades at LHC
por: Dalla Betta, Gian-Franco, et al.
Publicado: (2016)

Simulation of 3D pixel sensors cells
por: G.-F. Dalla Betta, et al.
Publicado: (2016)

Development of a new generation of 3D pixel sensors for HL-LHC
por: Dalla Betta, Gian-Franco, et al.
Publicado: (2015)

TCAD simulation of small-pitch 3D sensors for pixel detector upgrades at High Luminosity LHC
por: Boughedda, A, et al.
Publicado: (2021)

MEMS sensors and Vertically Integrated Micro-Fabricated Systems
por: Da Via, Cinzia, et al.
Publicado: (2013)

First Production of New Thin 3D Sensors for HL-LHC at FBK
por: Sultan, D.M.S., et al.
Publicado: (2016)

TCAD Analysis of Leakage Current and Breakdown Voltage in Small Pitch 3D Pixel Sensors
por: Ye, Jixing, et al.
Publicado: (2023)

Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone
por: Hopper, Richard, et al.
Publicado: (2022)

Fabrication and Characterization of a CMOS-MEMS Humidity Sensor
por: Dennis, John-Ojur, et al.
Publicado: (2015)

Neutron irradiation test of depleted CMOS pixel detector prototypes
por: Mandić, Igor, et al.
Publicado: (2017)

Poly-SiGe for MEMS-above-CMOS sensors
por: Gonzalez Ruiz, Pilar, et al.
Publicado: (2014)

1T Pixel Using Floating-Body MOSFET for CMOS Image Sensors
por: Lu, Guo-Neng, et al.
Publicado: (2009)

A CMOS Image Sensor Dark Current Compensation Using In-Pixel Temperature Sensors †
por: Abarca, Accel, et al.
Publicado: (2023)

Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide
por: Chen, Shu-Jung, et al.
Publicado: (2020)

IR sensitivity enhancement of CMOS Image Sensor with diffractive light trapping pixels
por: Yokogawa, Sozo, et al.
Publicado: (2017)

Single-Pixel MEMS Imaging Systems
por: Zhou, Guangcan, et al.
Publicado: (2020)

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications †
por: Mansoor, Mohtashim, et al.
Publicado: (2016)

CMOS Active Pixel Sensors for High Energy Physic
por: Musa, Luciano
Publicado: (2019)

Effects of Hot Pixels on Pixel Performance on Backside Illuminated Complementary Metal Oxide Semiconductor (CMOS) Image Sensors
por: Liu, Bingkai, et al.
Publicado: (2023)

Analysis and Simulation of Forcing the Limits of Thermal Sensing for Microbolometers in CMOS–MEMS Technology
por: Göktaş, Hasan, et al.
Publicado: (2019)

A 45 nm Stacked CMOS Image Sensor Process Technology for Submicron Pixel †
por: Takahashi, Seiji, et al.
Publicado: (2017)

Development in a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors
por: Moustakas, K, et al.
Publicado: (2018)

A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure
por: Huang, Jian-Qiu, et al.
Publicado: (2016)

Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
por: Fong, Chien-Fu, et al.
Publicado: (2015)

Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process
por: Cai, Chunhua, et al.
Publicado: (2018)

Characterization of planar and 3D Silicon pixel sensors for the high luminosity phase of the CMS experiment at LHC
por: Ceccarelli, Rudy, et al.
Publicado: (2019)

Thin Film on CMOS Active Pixel Sensor for Space Applications
por: Schulze Spuentrup, Jan Dirk, et al.
Publicado: (2008)

Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS
por: Krayden, Adir, et al.
Publicado: (2023)

Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor
por: Dennis, John Ojur, et al.
Publicado: (2015)

Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique
por: Shen, Wei-Chun, et al.
Publicado: (2020)

Thin and edgeless sensors for ATLAS pixel detector upgrade
por: Ducourthial, Audrey, et al.
Publicado: (2017)

From vertex detectors to inner trackers with CMOS pixel sensors
por: Besson, A., et al.
Publicado: (2016)

CMOS monolithic active pixel sensors for high energy physics
por: Snoeys, W
Publicado: (2014)

Optimisation of CMOS pixel sensors for high performance vertexing and tracking
por: Baudot, Jérôme, et al.
Publicado: (2013)

CMOS monolithic active pixel sensors (MAPS) for scientific applications
por: Turchetta, R
Publicado: (2003)

Conception and characterization of CMOS sensors for particle physics pixel detectors
por: Bhat, Siddharth
Publicado: (2022)

Performance of the FASTPIX Sub-Nanosecond CMOS Pixel Sensor Demonstrator
por: Braach, Justus, et al.
Publicado: (2022)

Development of Novel Pixel CMOS Sensors Optimised for Time Resolution
por: Hasenbichler, Jan
Publicado: (2022)

First tests of a novel radiation hard CMOS sensor process for Depleted Monolithic Active Pixel Sensors
por: Pernegger, Heinz, et al.
Publicado: (2017)

CMOS MEMS Fabrication Technologies and Devices
por: Qu, Hongwei
Publicado: (2016)

Cannot write session to /tmp/vufind_sessions/sess_qt43ii1i66u105o0op63tmg2pk