Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array

This paper presents a fully addressable 8 × 8 two-dimensional (2D) rigid piezoelectric micromachined ultrasonic transducer (PMUT) array. The PMUTs were fabricated on a standard silicon wafer, resulting in a low-cost solution for ultrasound imaging. A polyimide layer is used as the passive layer in t...

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Detalles Bibliográficos
Autores principales: Joshi, Sanjog Vilas, Sadeghpour, Sina, Kraft, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10221194/
https://www.ncbi.nlm.nih.gov/pubmed/37430741
http://dx.doi.org/10.3390/s23104826

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10221194/
https://www.ncbi.nlm.nih.gov/pubmed/37430741
http://dx.doi.org/10.3390/s23104826

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