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Structure and Chemical Composition of Ion-Synthesized Gallium Oxide Nanocrystals in Dielectric Matrices

The ion-beam synthesis of Ga(2)O(3) nanocrystals in dielectric matrices on silicon is a novel and promising way for creating nanomaterials based on gallium oxide. This research studies the regularities of changes, depending on the synthesis regimes used, in the chemical composition of ion-implanted...

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Detalles Bibliográficos
Autores principales: Korolev, Dmitry S., Kriukov, Ruslan N., Matyunina, Kristina S., Nikolskaya, Alena A., Belov, Alexey I., Mikhaylov, Alexey N., Sushkov, Artem A., Pavlov, Dmitry A., Tetelbaum, David I.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10221760/
https://www.ncbi.nlm.nih.gov/pubmed/37242074
http://dx.doi.org/10.3390/nano13101658