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Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane
This paper presents a SOI piezoresistive pressure sensor with the crossbeam membrane. The roots of the crossbeam were widened, which solved the problem of the poor dynamic performance of small-range pressure sensors working at a high temperature of 200 °C. A theoretical model was established to opti...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10221813/ https://www.ncbi.nlm.nih.gov/pubmed/37241668 http://dx.doi.org/10.3390/mi14051045 |