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Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane

This paper presents a SOI piezoresistive pressure sensor with the crossbeam membrane. The roots of the crossbeam were widened, which solved the problem of the poor dynamic performance of small-range pressure sensors working at a high temperature of 200 °C. A theoretical model was established to opti...

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Detalles Bibliográficos
Autores principales:	Hao, Le, Li, Cun, Wang, Lukang, Bai, Bing, Zhao, Yulong, Luo, Chao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10221813/ https://www.ncbi.nlm.nih.gov/pubmed/37241668 http://dx.doi.org/10.3390/mi14051045

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