A Single-Side Micromachined MPa-Scale High-Temperature Pressure Sensor

This paper proposes a piezoresistive high-temperature absolute pressure sensor based on (100)/(111) hybrid SOI (silicon-on-insulator) silicon wafers, where the active layer is (100) silicon and the handle layer is (111) silicon. The 1.5 MPa ranged sensor chips are designed with the size as tiny as 0...

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Detalles Bibliográficos
Autores principales: Li, Peng, Li, Wei, Chen, Changnan, Wu, Sheng, Pan, Pichao, Sun, Ke, Liu, Min, Wang, Jiachou, Li, Xinxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10221922/
https://www.ncbi.nlm.nih.gov/pubmed/37241606
http://dx.doi.org/10.3390/mi14050981

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10221922/
https://www.ncbi.nlm.nih.gov/pubmed/37241606
http://dx.doi.org/10.3390/mi14050981

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