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A Thermopile-Based Gas Flow Sensor with High Sensitivity for Noninvasive Respiration Monitoring
In this work, a N/P polySi thermopile-based gas flow device is presented, in which a microheater distributed in a comb-shaped structure is embedded around hot junctions of thermocouples. The unique design of the thermopile and the microheater effectively enhances performance of the gas flow sensor l...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222144/ https://www.ncbi.nlm.nih.gov/pubmed/37241534 http://dx.doi.org/10.3390/mi14050910 |