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A Thermopile-Based Gas Flow Sensor with High Sensitivity for Noninvasive Respiration Monitoring

In this work, a N/P polySi thermopile-based gas flow device is presented, in which a microheater distributed in a comb-shaped structure is embedded around hot junctions of thermocouples. The unique design of the thermopile and the microheater effectively enhances performance of the gas flow sensor l...

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Detalles Bibliográficos
Autores principales:	Liu, Zemin, Zhang, Chenchen, Ding, Xuefeng, Ni, Yue, Zhou, Na, Wang, Yanhong, Mao, Haiyang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222144/ https://www.ncbi.nlm.nih.gov/pubmed/37241534 http://dx.doi.org/10.3390/mi14050910

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