Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration

High motional resistance and incompatibility with post-CMOS fabrication due to thermal budget constraints are imperative issues associated with the back-end-of-line integration of lateral extensional vibrating micromechanical resonators. This paper presents piezoelectric ZnO-on-nickel resonators as...

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Detalles Bibliográficos
Autores principales: Zaman, Adnan, Alsolami, Abdulrahman, Wei, Mian, Rivera, Ivan, Baghelani, Masoud, Wang, Jing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222198/
https://www.ncbi.nlm.nih.gov/pubmed/37241712
http://dx.doi.org/10.3390/mi14051089

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222198/
https://www.ncbi.nlm.nih.gov/pubmed/37241712
http://dx.doi.org/10.3390/mi14051089

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