Modeling of MEMS Transducers with Perforated Moving Electrodes

Microfabricated electroacoustic transducers with perforated moving plates used as microphones or acoustic sources have appeared in the literature in recent years. However, optimization of the parameters of such transducers for use in the audio frequency range requires high-precision theoretical mode...

Descripción completa

Detalles Bibliográficos
Autores principales: Šimonová, Karina, Honzík, Petr
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222298/
https://www.ncbi.nlm.nih.gov/pubmed/37241545
http://dx.doi.org/10.3390/mi14050921

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222298/
https://www.ncbi.nlm.nih.gov/pubmed/37241545
http://dx.doi.org/10.3390/mi14050921

Ejemplares similares