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Modeling of MEMS Transducers with Perforated Moving Electrodes

Microfabricated electroacoustic transducers with perforated moving plates used as microphones or acoustic sources have appeared in the literature in recent years. However, optimization of the parameters of such transducers for use in the audio frequency range requires high-precision theoretical mode...

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Detalles Bibliográficos
Autores principales: Šimonová, Karina, Honzík, Petr
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222298/
https://www.ncbi.nlm.nih.gov/pubmed/37241545
http://dx.doi.org/10.3390/mi14050921
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author Šimonová, Karina
Honzík, Petr
author_facet Šimonová, Karina
Honzík, Petr
author_sort Šimonová, Karina
collection PubMed
description Microfabricated electroacoustic transducers with perforated moving plates used as microphones or acoustic sources have appeared in the literature in recent years. However, optimization of the parameters of such transducers for use in the audio frequency range requires high-precision theoretical modeling. The main objective of the paper is to provide such an analytical model of a miniature transducer with a moving electrode in the form of a perforated plate (rigid elastically supported or elastic clamped at all boundaries) loaded by an air gap surrounded by a small cavity. The formulation for the acoustic pressure field inside the air gap enables expression of the coupling of this field to the displacement field of the moving plate and to the incident acoustic pressure through the holes in the plate. The damping effects of the thermal and viscous boundary layers originating inside the air gap, the cavity, and the holes in the moving plate are also taken into account. The analytical results, namely, the acoustic pressure sensitivity of the transducer used as a microphone, are presented and compared to the numerical (FEM) results.
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spelling pubmed-102222982023-05-28 Modeling of MEMS Transducers with Perforated Moving Electrodes Šimonová, Karina Honzík, Petr Micromachines (Basel) Article Microfabricated electroacoustic transducers with perforated moving plates used as microphones or acoustic sources have appeared in the literature in recent years. However, optimization of the parameters of such transducers for use in the audio frequency range requires high-precision theoretical modeling. The main objective of the paper is to provide such an analytical model of a miniature transducer with a moving electrode in the form of a perforated plate (rigid elastically supported or elastic clamped at all boundaries) loaded by an air gap surrounded by a small cavity. The formulation for the acoustic pressure field inside the air gap enables expression of the coupling of this field to the displacement field of the moving plate and to the incident acoustic pressure through the holes in the plate. The damping effects of the thermal and viscous boundary layers originating inside the air gap, the cavity, and the holes in the moving plate are also taken into account. The analytical results, namely, the acoustic pressure sensitivity of the transducer used as a microphone, are presented and compared to the numerical (FEM) results. MDPI 2023-04-24 /pmc/articles/PMC10222298/ /pubmed/37241545 http://dx.doi.org/10.3390/mi14050921 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Šimonová, Karina
Honzík, Petr
Modeling of MEMS Transducers with Perforated Moving Electrodes
title Modeling of MEMS Transducers with Perforated Moving Electrodes
title_full Modeling of MEMS Transducers with Perforated Moving Electrodes
title_fullStr Modeling of MEMS Transducers with Perforated Moving Electrodes
title_full_unstemmed Modeling of MEMS Transducers with Perforated Moving Electrodes
title_short Modeling of MEMS Transducers with Perforated Moving Electrodes
title_sort modeling of mems transducers with perforated moving electrodes
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222298/
https://www.ncbi.nlm.nih.gov/pubmed/37241545
http://dx.doi.org/10.3390/mi14050921
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