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Free Vibration Analysis of a Tunable Micro-Fabrication Device Comprising Asymmetric L-Shaped Membranes

Membrane sensors have been widely used in various fields owing to their multifunctionality and cost-effectiveness. However, few studies have investigated frequency-tunable membrane sensors, which could enable versatility in the face of different device requirements while retaining high sensitivity,...

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Detalles Bibliográficos
Autores principales: Xiong, Cheng-Hua, He, Lian-Gui, Chang, Kao-Hao, Huang, Chang-Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222458/
https://www.ncbi.nlm.nih.gov/pubmed/37242870
http://dx.doi.org/10.3390/polym15102293