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Free Vibration Analysis of a Tunable Micro-Fabrication Device Comprising Asymmetric L-Shaped Membranes
Membrane sensors have been widely used in various fields owing to their multifunctionality and cost-effectiveness. However, few studies have investigated frequency-tunable membrane sensors, which could enable versatility in the face of different device requirements while retaining high sensitivity,...
Autores principales: | Xiong, Cheng-Hua, He, Lian-Gui, Chang, Kao-Hao, Huang, Chang-Wei |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222458/ https://www.ncbi.nlm.nih.gov/pubmed/37242870 http://dx.doi.org/10.3390/polym15102293 |
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