Structural Analysis of Mo Thin Films on Sapphire Substrates for Epitaxial Growth of AlN

Aluminum nitride (AlN) thin film/molybdenum (Mo) electrode structures are typically required in microelectromechanical system applications. However, the growth of highly crystalline and c-axis-oriented AlN thin films on Mo electrodes remains challenging. In this study, we demonstrate the epitaxial g...

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Detalles Bibliográficos
Autores principales: Kim, Jihong, Kim, Youngil, Hong, Sung-Min
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222929/
https://www.ncbi.nlm.nih.gov/pubmed/37241589
http://dx.doi.org/10.3390/mi14050966

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222929/
https://www.ncbi.nlm.nih.gov/pubmed/37241589
http://dx.doi.org/10.3390/mi14050966

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