Modal-Transition-Induced Valleys of K(2) in Piezoelectric Bilayer Laterally Vibrating Resonators

Piezoelectric Laterally Vibrating Resonators (LVRs) have attracted significant attention as a potential technology for next-generation wafer-level multi-band filters. Piezoelectric bilayer structures such as Thin-film Piezoelectric-on-Silicon (TPoS) LVRs which aim to increase the quality factor (Q)...

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Detalles Bibliográficos
Autores principales: Xie, Zihao, Sun, Jiabao, Xie, Jin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10223328/
https://www.ncbi.nlm.nih.gov/pubmed/37241645
http://dx.doi.org/10.3390/mi14051022

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10223328/
https://www.ncbi.nlm.nih.gov/pubmed/37241645
http://dx.doi.org/10.3390/mi14051022

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