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Modal-Transition-Induced Valleys of K(2) in Piezoelectric Bilayer Laterally Vibrating Resonators
Piezoelectric Laterally Vibrating Resonators (LVRs) have attracted significant attention as a potential technology for next-generation wafer-level multi-band filters. Piezoelectric bilayer structures such as Thin-film Piezoelectric-on-Silicon (TPoS) LVRs which aim to increase the quality factor (Q)...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10223328/ https://www.ncbi.nlm.nih.gov/pubmed/37241645 http://dx.doi.org/10.3390/mi14051022 |