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Static and Eigenvalue Analysis of Electrostatically Coupled and Tunable Shallow Micro-Arches for Sensing-Based Applications
This paper investigated the mechanical performance of an electrostatically tunable microbeams-based resonators. The resonator was designed based on two initially-curved microbeams that are electrostatically coupled, offering the potential for improved performance compared to single-beam based resona...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10223515/ https://www.ncbi.nlm.nih.gov/pubmed/37241527 http://dx.doi.org/10.3390/mi14050903 |