Effect of Deposition Temperature on Long-Term Residual Stress Evolution of Au Films

To increase the residual stress stability of Au films while reducing the residual stress level, the effect of deposition temperature on long-term residual stress evolution of Au films under different conditions were studied. Au films with a thickness of 360 nm were deposited using e-beam evaporation...

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Detalles Bibliográficos
Autores principales: Zhou, Shujun, Wu, Wei, Yang, Yilun, Huang, Xiao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10224161/
https://www.ncbi.nlm.nih.gov/pubmed/37241272
http://dx.doi.org/10.3390/ma16103645

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10224161/
https://www.ncbi.nlm.nih.gov/pubmed/37241272
http://dx.doi.org/10.3390/ma16103645

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