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Effect of Deposition Temperature on Long-Term Residual Stress Evolution of Au Films
To increase the residual stress stability of Au films while reducing the residual stress level, the effect of deposition temperature on long-term residual stress evolution of Au films under different conditions were studied. Au films with a thickness of 360 nm were deposited using e-beam evaporation...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10224161/ https://www.ncbi.nlm.nih.gov/pubmed/37241272 http://dx.doi.org/10.3390/ma16103645 |