Attentional Ptycho-Tomography (APT) for three-dimensional nanoscale X-ray imaging with minimal data acquisition and computation time

Noninvasive X-ray imaging of nanoscale three-dimensional objects, such as integrated circuits (ICs), generally requires two types of scanning: ptychographic, which is translational and returns estimates of the complex electromagnetic field through the IC; combined with a tomographic scan, which coll...

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Detalles Bibliográficos
Autores principales: Kang, Iksung, Wu, Ziling, Jiang, Yi, Yao, Yudong, Deng, Junjing, Klug, Jeffrey, Vogt, Stefan, Barbastathis, George
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10227032/
https://www.ncbi.nlm.nih.gov/pubmed/37248235
http://dx.doi.org/10.1038/s41377-023-01181-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10227032/
https://www.ncbi.nlm.nih.gov/pubmed/37248235
http://dx.doi.org/10.1038/s41377-023-01181-8

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