A fluid model of pulsed direct current planar magnetron discharge

We simulated a pulsed direct current (DC) planar magnetron discharge using fluid model, solving for species continuity, momentum, and energy transfer equations, coupled with Poisson equation and Lorentz force for electromagnetism. Based on a validated DC magnetron model, an asymmetric bipolar potent...

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Detalles Bibliográficos
Autores principales: Tran, Si Bui Quang, Leong, Fong Yew, Hariharaputran, Ramanarayan, Le, Duc Vinh
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10239496/
https://www.ncbi.nlm.nih.gov/pubmed/37270594
http://dx.doi.org/10.1038/s41598-023-36231-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10239496/
https://www.ncbi.nlm.nih.gov/pubmed/37270594
http://dx.doi.org/10.1038/s41598-023-36231-z

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