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Study of GaN coalescence by dark-field X-ray microscopy at the nanoscale
This work illustrates the potential of dark-field X-ray microscopy (DFXM), a 3D imaging technique of nanostructures, in characterizing novel epitaxial structures of gallium nitride (GaN) on top of GaN/AlN/Si/SiO(2) nano-pillars for optoelectronic applications. The nano-pillars are intended to allow...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
International Union of Crystallography
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10241046/ https://www.ncbi.nlm.nih.gov/pubmed/37284275 http://dx.doi.org/10.1107/S160057672300287X |