Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches

Electrostatic microelectromechanical (MEMS) switches are the basic building blocks for various radio-frequency (RF) transceivers. However, conventional cantilever-based designs of MEMS switches require a large actuation voltage, exhibit limited RF performance, and suffer from many performance tradeo...

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Detalles Bibliográficos
Autores principales: Bajwa, Rayan, Saleh, Heba, Shojaeian, Milad, Tekin, Ibrahim, Yapici, Murat Kaya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10247711/
https://www.ncbi.nlm.nih.gov/pubmed/37303832
http://dx.doi.org/10.1038/s41378-023-00549-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10247711/
https://www.ncbi.nlm.nih.gov/pubmed/37303832
http://dx.doi.org/10.1038/s41378-023-00549-5

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