A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing

The requirement for alternatives in roll-to-roll (R2R) processing to expand thin film inspection in wider substrates at lower costs and reduced dimensions, and the need to enable newer control feedback options for these types of processes, represents an opportunity to explore the applicability of ne...

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Detalles Bibliográficos
Autores principales: Sánchez-Arriaga, Néstor Eduardo, Tiwari, Divya, Hutabarat, Windo, Leyland, Adrian, Tiwari, Ashutosh
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10256034/
https://www.ncbi.nlm.nih.gov/pubmed/37300053
http://dx.doi.org/10.3390/s23115326

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10256034/
https://www.ncbi.nlm.nih.gov/pubmed/37300053
http://dx.doi.org/10.3390/s23115326

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