Cargando…

A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing

The requirement for alternatives in roll-to-roll (R2R) processing to expand thin film inspection in wider substrates at lower costs and reduced dimensions, and the need to enable newer control feedback options for these types of processes, represents an opportunity to explore the applicability of ne...

Descripción completa

Detalles Bibliográficos
Autores principales: Sánchez-Arriaga, Néstor Eduardo, Tiwari, Divya, Hutabarat, Windo, Leyland, Adrian, Tiwari, Ashutosh
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10256034/
https://www.ncbi.nlm.nih.gov/pubmed/37300053
http://dx.doi.org/10.3390/s23115326
_version_ 1785057016434130944
author Sánchez-Arriaga, Néstor Eduardo
Tiwari, Divya
Hutabarat, Windo
Leyland, Adrian
Tiwari, Ashutosh
author_facet Sánchez-Arriaga, Néstor Eduardo
Tiwari, Divya
Hutabarat, Windo
Leyland, Adrian
Tiwari, Ashutosh
author_sort Sánchez-Arriaga, Néstor Eduardo
collection PubMed
description The requirement for alternatives in roll-to-roll (R2R) processing to expand thin film inspection in wider substrates at lower costs and reduced dimensions, and the need to enable newer control feedback options for these types of processes, represents an opportunity to explore the applicability of newer reduced-size spectrometers sensors. This paper presents the hardware and software development of a novel low-cost spectroscopic reflectance system using two state-of-the-art sensors for thin film thickness measurements. The parameters to enable the thin film measurements using the proposed system are the light intensity for two LEDs, the microprocessor integration time for both sensors and the distance from the thin film standard to the device light channel slit for reflectance calculations. The proposed system can deliver better-fit errors compared with a HAL/DEUT light source using two methods: curve fitting and interference interval. By enabling the curve fitting method, the lowest root mean squared error (RMSE) obtained for the best combination of components was 0.022 and the lowest normalised mean squared error (MSE) was 0.054. The interference interval method showed an error of 0.09 when comparing the measured with the expected modelled value. The proof of concept in this research work enables the expansion of multi-sensor arrays for thin film thickness measurements and the potential application in moving environments.
format Online
Article
Text
id pubmed-10256034
institution National Center for Biotechnology Information
language English
publishDate 2023
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-102560342023-06-10 A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing Sánchez-Arriaga, Néstor Eduardo Tiwari, Divya Hutabarat, Windo Leyland, Adrian Tiwari, Ashutosh Sensors (Basel) Article The requirement for alternatives in roll-to-roll (R2R) processing to expand thin film inspection in wider substrates at lower costs and reduced dimensions, and the need to enable newer control feedback options for these types of processes, represents an opportunity to explore the applicability of newer reduced-size spectrometers sensors. This paper presents the hardware and software development of a novel low-cost spectroscopic reflectance system using two state-of-the-art sensors for thin film thickness measurements. The parameters to enable the thin film measurements using the proposed system are the light intensity for two LEDs, the microprocessor integration time for both sensors and the distance from the thin film standard to the device light channel slit for reflectance calculations. The proposed system can deliver better-fit errors compared with a HAL/DEUT light source using two methods: curve fitting and interference interval. By enabling the curve fitting method, the lowest root mean squared error (RMSE) obtained for the best combination of components was 0.022 and the lowest normalised mean squared error (MSE) was 0.054. The interference interval method showed an error of 0.09 when comparing the measured with the expected modelled value. The proof of concept in this research work enables the expansion of multi-sensor arrays for thin film thickness measurements and the potential application in moving environments. MDPI 2023-06-04 /pmc/articles/PMC10256034/ /pubmed/37300053 http://dx.doi.org/10.3390/s23115326 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Sánchez-Arriaga, Néstor Eduardo
Tiwari, Divya
Hutabarat, Windo
Leyland, Adrian
Tiwari, Ashutosh
A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing
title A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing
title_full A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing
title_fullStr A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing
title_full_unstemmed A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing
title_short A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing
title_sort spectroscopic reflectance-based low-cost thickness measurement system for thin films: development and testing
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10256034/
https://www.ncbi.nlm.nih.gov/pubmed/37300053
http://dx.doi.org/10.3390/s23115326
work_keys_str_mv AT sanchezarriaganestoreduardo aspectroscopicreflectancebasedlowcostthicknessmeasurementsystemforthinfilmsdevelopmentandtesting
AT tiwaridivya aspectroscopicreflectancebasedlowcostthicknessmeasurementsystemforthinfilmsdevelopmentandtesting
AT hutabaratwindo aspectroscopicreflectancebasedlowcostthicknessmeasurementsystemforthinfilmsdevelopmentandtesting
AT leylandadrian aspectroscopicreflectancebasedlowcostthicknessmeasurementsystemforthinfilmsdevelopmentandtesting
AT tiwariashutosh aspectroscopicreflectancebasedlowcostthicknessmeasurementsystemforthinfilmsdevelopmentandtesting
AT sanchezarriaganestoreduardo spectroscopicreflectancebasedlowcostthicknessmeasurementsystemforthinfilmsdevelopmentandtesting
AT tiwaridivya spectroscopicreflectancebasedlowcostthicknessmeasurementsystemforthinfilmsdevelopmentandtesting
AT hutabaratwindo spectroscopicreflectancebasedlowcostthicknessmeasurementsystemforthinfilmsdevelopmentandtesting
AT leylandadrian spectroscopicreflectancebasedlowcostthicknessmeasurementsystemforthinfilmsdevelopmentandtesting
AT tiwariashutosh spectroscopicreflectancebasedlowcostthicknessmeasurementsystemforthinfilmsdevelopmentandtesting