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Dislocation and strain mapping in metamorphic parabolic-graded InGaAs buffers on GaAs
We investigate different architectures for parabolic-graded InGaAs metamorphic buffers grown on GaAs using transmission electron microscopy techniques. The different architectures include InGaP and AlInGaAs/InGaP superlattices with different GaAs substrate misorientations and the inclusion of a stra...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10261241/ https://www.ncbi.nlm.nih.gov/pubmed/37323808 http://dx.doi.org/10.1007/s10853-023-08597-y |