A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform

The availability of thin-film lithium niobate on insulator (LNOI) and advances in processing have led to the emergence of fully integrated LiNbO(3) electro-optic devices. Yet to date, LiNbO(3) photonic integrated circuits have mostly been fabricated using non-standard etching techniques and partiall...

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Detalles Bibliográficos
Autores principales: Churaev, Mikhail, Wang, Rui Ning, Riedhauser, Annina, Snigirev, Viacheslav, Blésin, Terence, Möhl, Charles, Anderson, Miles H., Siddharth, Anat, Popoff, Youri, Drechsler, Ute, Caimi, Daniele, Hönl, Simon, Riemensberger, Johann, Liu, Junqiu, Seidler, Paul, Kippenberg, Tobias J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10264395/
https://www.ncbi.nlm.nih.gov/pubmed/37311746
http://dx.doi.org/10.1038/s41467-023-39047-7

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10264395/
https://www.ncbi.nlm.nih.gov/pubmed/37311746
http://dx.doi.org/10.1038/s41467-023-39047-7

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