Facile Fabrication of High-Performance Thermochromic VO(2)-Based Films on Si for Application in Phase-Change Devices

[Image: see text] This work reports on an alternative and advantageous procedure to attain VO(2)-based thermochromic coatings on silicon substrates. It involves the sputtering of vanadium thin films at glancing angles and their subsequent fast annealing in an air atmosphere. By adjusting thickness a...

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Detalles Bibliográficos
Autores principales: Santos, Antonio J., Martin, Nicolas, Jiménez, Juan J., Alcántara, Rodrigo, Margueron, Samuel, Casas-Acuña, Andrea, García, Rafael, Morales, Francisco M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10268973/
https://www.ncbi.nlm.nih.gov/pubmed/37332680
http://dx.doi.org/10.1021/acs.chemmater.3c00613

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10268973/
https://www.ncbi.nlm.nih.gov/pubmed/37332680
http://dx.doi.org/10.1021/acs.chemmater.3c00613

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