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Facile Fabrication of High-Performance Thermochromic VO(2)-Based Films on Si for Application in Phase-Change Devices
[Image: see text] This work reports on an alternative and advantageous procedure to attain VO(2)-based thermochromic coatings on silicon substrates. It involves the sputtering of vanadium thin films at glancing angles and their subsequent fast annealing in an air atmosphere. By adjusting thickness a...
Autores principales: | Santos, Antonio J., Martin, Nicolas, Jiménez, Juan J., Alcántara, Rodrigo, Margueron, Samuel, Casas-Acuña, Andrea, García, Rafael, Morales, Francisco M. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2023
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10268973/ https://www.ncbi.nlm.nih.gov/pubmed/37332680 http://dx.doi.org/10.1021/acs.chemmater.3c00613 |
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